The All Sensors’ pressure sensor dies use a proprietary Collinear Beam²™-Technology registered as CoBeam²™. CoBeam²™ Technology achieves a high level of pressure sensitivity previously requiring boss structures and larger die topologies. By eliminating the more typical boss structure in the design, both gravity and vibration sensitivity are significantly reduced.
The CoBeam²™ Technology embodies aspects of 1950’s bonded strain gage sensors with state of the art MEMS processing of silicon wafers.